Transfer Chamber
The transfer chamber is a core process component in semiconductor equipment, requiring high levels of sealing, cleanliness, and corrosion resistance.
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Product Characteristics
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Product Parameters
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Product Characteristics
High precision, complex critical features
The part has multiple critical features and dimensions crucial for wafer transfer and sealing.
High Sealing Performance
The primary purpose of the transfer chamber is to move wafers from one chamber to another; sealing is key to ensuring wafer quality.
High Cleanliness
High-cleanliness equipment components are fundamental for achieving high yield rates in wafer processing. The cleanliness of process equipment directly determines the yield rate of wafers in process and subsequent chips, even determining if an entire production line can produce qualified products.
Product Parameters
| Material: | Aluminum Alloy |
| Overall Dimensions: | 3200*1500*220mm |
